Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide
出版年份 2021 全文链接
标题
Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 118, Issue 1, Pages 012901
出版商
AIP Publishing
发表日期
2021-01-04
DOI
10.1063/5.0029635
参考文献
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