Local crystallographic phase detection and texture mapping in ferroelectric Zr doped HfO2 films by transmission-EBSD

标题
Local crystallographic phase detection and texture mapping in ferroelectric Zr doped HfO2 films by transmission-EBSD
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 115, Issue 22, Pages 222902
出版商
AIP Publishing
发表日期
2019-11-27
DOI
10.1063/1.5129318

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