Study of ferroelectric characteristics of Hf0.5Zr0.5O2 thin films grown on sputtered or atomic-layer-deposited TiN bottom electrodes
出版年份 2020 全文链接
标题
Study of ferroelectric characteristics of Hf0.5Zr0.5O2 thin films grown on sputtered or atomic-layer-deposited TiN bottom electrodes
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 2, Pages 022902
出版商
AIP Publishing
发表日期
2020-07-14
DOI
10.1063/5.0011663
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface
- (2020) W. Hamouda et al. JOURNAL OF APPLIED PHYSICS
- Mitigating wakeup effect and improving endurance of ferroelectric HfO2-ZrO2 thin films by careful La-doping
- (2019) Maxim G. Kozodaev et al. JOURNAL OF APPLIED PHYSICS
- A comprehensive study on the mechanism of ferroelectric phase formation in hafnia-zirconia nanolaminates and superlattices
- (2019) Min Hyuk Park et al. Applied Physics Reviews
- Improved Ferroelectric Switching Endurance of La-Doped Hf0.5Zr0.5O2 Thin Films
- (2018) Anna G. Chernikova et al. ACS Applied Materials & Interfaces
- Pyroelectricity of silicon-doped hafnium oxide thin films
- (2018) Sven Jachalke et al. APPLIED PHYSICS LETTERS
- Review and perspective on ferroelectric HfO2-based thin films for memory applications
- (2018) Min Hyuk Park et al. MRS Communications
- Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
- (2016) Min Hyuk Park et al. ACS Applied Materials & Interfaces
- Physical Mechanisms behind the Field-Cycling Behavior of HfO2 -Based Ferroelectric Capacitors
- (2016) Milan Pešić et al. ADVANCED FUNCTIONAL MATERIALS
- A study on the wake-up effect of ferroelectric Hf0.5Zr0.5O2films by pulse-switching measurement
- (2016) Han Joon Kim et al. Nanoscale
- Structural Changes Underlying Field-Cycling Phenomena in Ferroelectric HfO2Thin Films
- (2016) Everett D. Grimley et al. Advanced Electronic Materials
- The origin of ferroelectricity in Hf1−xZrxO2: A computational investigation and a surface energy model
- (2015) R. Materlik et al. JOURNAL OF APPLIED PHYSICS
- Study on the internal field and conduction mechanism of atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films
- (2015) M. H. Park et al. Journal of Materials Chemistry C
- Ferroelectric phase transitions in nanoscale HfO 2 films enable giant pyroelectric energy conversion and highly efficient supercapacitors
- (2015) Michael Hoffmann et al. Nano Energy
- Toward a multifunctional monolithic device based on pyroelectricity and the electrocaloric effect of thin antiferroelectric Hf x Zr 1−x O 2 films
- (2015) Min Hyuk Park et al. Nano Energy
- Prospective of Semiconductor Memory Devices: from Memory System to Materials
- (2015) Cheol Seong Hwang Advanced Electronic Materials
- Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
- (2014) Han Joon Kim et al. APPLIED PHYSICS LETTERS
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
- The effect of crystal symmetry on the maximum polarization of polycrystalline ferroelectric materials
- (2010) Jacob L. Jones Materials Science and Engineering B-Advanced Functional Solid-State Materials
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