Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films

Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator

(2019) Abu Naim R. Ahmed et al.   OPTICS LETTERS

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

(2019) Quentin Wilmart et al.   Applied Sciences-Basel

Towards subterahertz bandwidth ultracompact lithium niobate electrooptic modulators

(2019) Amirmahdi Honardoost et al.   OPTICS EXPRESS

Improved second harmonic performance in periodically poled LNOI waveguides through engineering of lateral leakage

(2019) Andreas Boes et al.   OPTICS EXPRESS

Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides

(2018) Martin Hubert Peter Pfeiffer et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Mid-infrared frequency comb via coherent dispersive wave generation in silicon nitride nanophotonic waveguides

(2018) Hairun Guo et al.   Nature Photonics

Nonlinear silicon nitride waveguides based on PECVD deposition platform

(2018) Linghua Wang et al.   OPTICS EXPRESS

On-chip dual-comb source for spectroscopy

(2018) Avik Dutt et al.   Science Advances

Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices

(2018) Wesley D. Sacher et al.   PROCEEDINGS OF THE IEEE

SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress

(2017) S. Schmidt et al.   JOURNAL OF APPLIED PHYSICS

Expanding the Silicon Photonics Portfolio With Silicon Nitride Photonic Integrated Circuits

(2017) Abdul Rahim et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon

(2017) Lin Chang et al.   OPTICS LETTERS

A new material platform of Si photonics for implementing architecture of dense wavelength division multiplexing on Si bulk wafer

(2017) Ziyi Zhang et al.   SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS

Deuterated SiN/SiON Waveguides on Si Platform and Their Application to C-Band WDM Filters

(2017) Tatsurou Hiraki et al.   IEEE Photonics Journal

Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications

(2017) Alain E. Kaloyeros et al.   ECS Journal of Solid State Science and Technology

Ultra-low-loss Ta_2O_5-core/SiO_2-clad planar waveguides on Si substrates

(2017) Michael Belt et al.   Optica

Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold

(2017) Xingchen Ji et al.   Optica

A kinetic model for stress generation in thin films grown from energetic vapor fluxes

(2016) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Ultra-low temperature silicon nitride photonic integration platform

(2016) Zengkai Shao et al.   OPTICS EXPRESS

Effect of precursors on propagation loss for plasma-enhanced chemical vapor deposition of SiN_x:H waveguides

(2016) E. A. Douglas et al.   Optical Materials Express

Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platforms and Devices

(2015) Wesley D. Sacher et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

CMOS compatible monolithic multi-layer Si_3N_4-on-SOI platform for low-loss high performance silicon photonics dense integration

(2014) Ying Huang et al.   OPTICS EXPRESS

Efficient silicon nitride grating coupler with distributed Bragg reflectors

(2014) Huijuan Zhang et al.   OPTICS EXPRESS

Low-Loss Silicon Nitride AWG Demultiplexer Heterogeneously Integrated With Hybrid III–V/Silicon Photodetectors

(2013) Molly Piels et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform

(2013) Qing Li et al.   OPTICS EXPRESS

Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line

(2013) A. Z. Subramanian et al.   IEEE Photonics Journal

Back-End Deposited Silicon Photonics for Monolithic Integration on CMOS

(2012) Y. H. D. Lee et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Integrated optical devices for lab-on-a-chip biosensing applications

(2011) M.C. Estevez et al.   Laser & Photonics Reviews

High quality factor etchless silicon photonic ring resonators

(2011) Lian-Wee Luo et al.   OPTICS EXPRESS

Low-loss, high-index-contrast Si_3N_4/SiO_2 optical waveguides for optical delay lines in microwave photonics signal processing

(2011) Leimeng Zhuang et al.   OPTICS EXPRESS

Scalable 3D dense integration of photonics on bulk silicon

(2011) Nicolás Sherwood-Droz et al.   OPTICS EXPRESS

Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties

(2008) A. Gorin et al.   OPTICS EXPRESS

Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module

(2008) S. C. Mao et al.   OPTICS EXPRESS