Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module

标题
Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 16, Issue 25, Pages 20809
出版商
The Optical Society
发表日期
2008-12-03
DOI
10.1364/oe.16.020809

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