Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices

出版年份 2018 全文链接

标题

作者

关键词

出版物

Volume -, Issue -, Pages 1-14

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2018-08-31

DOI

10.1109/jproc.2018.2860994

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