Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
出版年份 2016 全文链接
标题
Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 109, Issue 14, Pages 143101
出版商
AIP Publishing
发表日期
2016-10-04
DOI
10.1063/1.4963784
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