Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
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Title
Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 14, Pages 143101
Publisher
AIP Publishing
Online
2016-10-04
DOI
10.1063/1.4963784
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