标题
Design Approaches of MEMS Microphones for Enhanced Performance
作者
关键词
-
出版物
Journal of Sensors
Volume 2019, Issue -, Pages 1-26
出版商
Hindawi Limited
发表日期
2019-03-07
DOI
10.1155/2019/9294528
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Fly Ormia Ochracea Inspired MEMS Directional Microphone: A Review
- (2018) Asif Ishfaque et al. IEEE SENSORS JOURNAL
- MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
- (2018) Germano Nicollini et al. IEEE SENSORS JOURNAL
- A Low-Frequency Dual-Band Operational Microphone Mimicking the Hearing Property of Ormia Ochracea
- (2018) Yansheng Zhang et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- A novel MEMS capacitive microphone using spring-type diaphragm
- (2018) Sedighe Babaei Sedaghat et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- A biologically inspired piezoelectric microphone
- (2017) Neal A. Hall et al. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
- Implementation of a Virtual Microphone Array to Obtain High Resolution Acoustic Images
- (2017) Alberto Izquierdo et al. SENSORS
- On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones
- (2017) Yoonho Seo et al. SENSORS AND ACTUATORS A-PHYSICAL
- Bio-Inspired Miniature Direction Finding Acoustic Sensor
- (2016) Daniel Wilmott et al. Scientific Reports
- Acoustical-Thermal Noise in a Capacitive MEMS Microphone
- (2015) Byung-Hun Kim et al. IEEE SENSORS JOURNAL
- A MEMS Low-Noise Sound Pressure Gradient Microphone With Capacitive Sensing
- (2015) Ronald N. Miles et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- A biomimetic coupled circuit based microphone array for sound source localization
- (2015) Huping Xu et al. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
- Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure
- (2015) Hassan Gharaei et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Sound source localization inspired by the ears of the Ormia ochracea
- (2014) Michael L. Kuntzman et al. APPLIED PHYSICS LETTERS
- A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200 kHz bandwidth
- (2014) Michael L. Kuntzman et al. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
- Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading
- (2014) Jue Li et al. MICROELECTRONICS RELIABILITY
- Design of Small MEMS Microphone Array Systems for Direction Finding of Outdoors Moving Vehicles
- (2014) Xin Zhang et al. SENSORS
- Design and Fabrication of Si-Diaphragm, ZnO Piezoelectric Film-Based MEMS Acoustic Sensor Using SOI Wafers
- (2013) Mahanth Prasad et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- A surface-micromachined capacitive microphone with improved sensitivity
- (2013) Chang Han Je et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- A biologically inspired silicon differential microphone with active Q control and optical sensing
- (2013) Ronald Miles et al. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
- Study of structural noise owing to nonlinear behavior of capacitive microphones
- (2013) Hadi Madinei et al. MICROELECTRONICS JOURNAL
- Recent developments in MEMS sensors: a review of applications, markets and technologies
- (2013) Robert Bogue Sensor Review
- Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators
- (2012) Robert Littrell et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
- (2012) Matthew D. Williams et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Design and Implementation of a Capacitive-type Microphone with Rigid Diaphragm and Flexible Spring Using the Two Poly Silicon Micromachining Processes
- (2011) Chan et al. IEEE SENSORS JOURNAL
- Physical Analysis of a Biomimetic Microphone With a Central-Supported (C-S) Circular Diaphragm for Sound Source Localization
- (2011) Chien-Chang Chen et al. IEEE SENSORS JOURNAL
- Performance and Modeling of a Fully Packaged Micromachined Optical Microphone
- (2011) Michael L. Kuntzman et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Improving response of a MEMS capacitive microphone filtering shock noise
- (2011) Armin Saeedi Vahdat et al. MICROELECTRONICS JOURNAL
- Fabrication of a microelectromechanical directional sound sensor with electronic readout using comb fingers
- (2010) Michael Touse et al. APPLIED PHYSICS LETTERS
- Effect of thermal stresses on stability and frequency response of a capacitive microphone
- (2010) Armin Saeedivahdat et al. MICROELECTRONICS JOURNAL
- Flip chip packaging for MEMS microphones
- (2010) Gregor Feiertag et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Real-world benefit from directional microphone hearing aids
- (2009) David Gnewikow et al. JOURNAL OF REHABILITATION RESEARCH AND DEVELOPMENT
- A low-noise differential microphone inspired by the ears of the parasitoid flyOrmia ochracea
- (2009) R. N. Miles et al. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
- Piezoelectric MEMS sensors: state-of-the-art and perspectives
- (2009) S Tadigadapa et al. MEASUREMENT SCIENCE and TECHNOLOGY
- Biomimetic optical directional microphone with structurally coupled diaphragms
- (2008) H. J. Liu et al. APPLIED PHYSICS LETTERS
- Piezoelectric microphone built on circular diaphragm
- (2008) Woon Seob Lee et al. SENSORS AND ACTUATORS A-PHYSICAL
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