标题
Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope
作者
关键词
-
出版物
Micromachines
Volume 10, Issue 3, Pages 186
出版商
MDPI AG
发表日期
2019-03-14
DOI
10.3390/mi10030186
参考文献
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