A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

标题
A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
作者
关键词
-
出版物
AIP Advances
Volume 7, Issue 12, Pages 125301
出版商
AIP Publishing
发表日期
2017-12-01
DOI
10.1063/1.5002156

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