Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

标题
Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting
作者
关键词
ZnO thin films, Vibrational energy harvesting, 2DOF, Piezoelectric, MEMS
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 359, Issue -, Pages 289-295
出版商
Elsevier BV
发表日期
2018-12-21
DOI
10.1016/j.surfcoat.2018.11.102

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