Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon

标题
Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 7, Pages 075003
出版商
IOP Publishing
发表日期
2013-05-21
DOI
10.1088/0960-1317/23/7/075003

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