Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs

标题
Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 154, Issue 1, Pages 180-186
出版商
Elsevier BV
发表日期
2009-07-26
DOI
10.1016/j.sna.2009.07.009

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