Machining Performance of Sputter-Deposited (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 High-Entropy Nitride Coatings

High-Entropy Alloys: A Critical Review

(2014) Ming-Hung Tsai et al.   Materials Research Letters

Superior Oxidation Resistance of (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50High-Entropy Nitride

(2013) W. J. Shen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Solid solution coating of (TiVCrZrHf)N with unusual structural evolution

(2012) Du-Cheng Tsai et al.   SURFACE & COATINGS TECHNOLOGY

Effects of substrate bias on the structure and mechanical properties of (Al1.5CrNb0.5Si0.5Ti)Nx coatings

(2012) Wan-Jui Shen et al.   THIN SOLID FILMS

Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings

(2011) V. Braic et al.   SURFACE & COATINGS TECHNOLOGY

Inhibition of grain coarsening up to 1000°C in (AlCrNbSiTiV)N superhard coatings

(2010) Ping-Kang Huang et al.   SCRIPTA MATERIALIA

10-nm-thick quinary (AlCrTaTiZr)N film as effective diffusion barrier for Cu interconnects at 900 °C

(2009) Shou-Yi Chang et al.   APPLIED PHYSICS LETTERS

Effects of substrate bias on structure and mechanical properties of (AlCrNbSiTiV)N coatings

(2009) Ping-Kang Huang et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization

(2009) Shou-Yi Chang et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)Nxcoatings

(2008) Ming-Hung Tsai et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings

(2008) Chia-Han Lai et al.   SURFACE & COATINGS TECHNOLOGY

Industrial applications of superhard nanocomposite coatings

(2008) Stan Veprek et al.   SURFACE & COATINGS TECHNOLOGY

Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

(2007) Hui-Wen Chang et al.   SURFACE & COATINGS TECHNOLOGY