Effects of substrate bias on the structure and mechanical properties of (Al1.5CrNb0.5Si0.5Ti)Nx coatings

标题
Effects of substrate bias on the structure and mechanical properties of (Al1.5CrNb0.5Si0.5Ti)Nx coatings
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 19, Pages 6183-6188
出版商
Elsevier BV
发表日期
2012-06-07
DOI
10.1016/j.tsf.2012.06.002

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