Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)Nxcoatings

标题
Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)Nxcoatings
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 23, Pages 235402
出版商
IOP Publishing
发表日期
2008-11-05
DOI
10.1088/0022-3727/41/23/235402

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