Optically monitoring and controlling nanoscale topography during semiconductor etching

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

(2011) Guy M. Burrow et al.   Micromachines

Imaging ellipsometry of graphene

(2010) Ulrich Wurstbauer et al.   APPLIED PHYSICS LETTERS

Measurement of red blood cell mechanics during morphological changes

(2010) Y. Park et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Metabolic remodeling of the human red blood cell membrane

(2010) Y. Park et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Resonantly enhanced selective photochemical etching of GaN

(2009) E. Trichas et al.   APPLIED PHYSICS LETTERS

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

(2009) Maria Losurdo et al.   JOURNAL OF NANOPARTICLE RESEARCH

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes

(2009) A. J. M. Mackus et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Precise etch-depth control of microlens-integrated intracavity contacted vertical-cavity surface-emitting lasers by in-situ laser reflectometry and reflectivity modeling

(2009) Y.M. Song et al.   THIN SOLID FILMS

Monitoring plasma etching of biomolecules by imaging ellipsometry

(2009) H. Rauscher et al.   VACUUM

Phase imaging of cells by simultaneous dual-wavelength reflection digital holography

(2008) Alexander Khmaladze et al.   OPTICS EXPRESS

Refractive index maps and membrane dynamics of human red blood cells parasitized by Plasmodium falciparum

(2008) Y. Park et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA