Monitoring plasma etching of biomolecules by imaging ellipsometry - Peeref

标题

Monitoring plasma etching of biomolecules by imaging ellipsometry

作者

关键词

-

出版物

VACUUM

Volume 84, Issue 1, Pages 75-78

出版商

Elsevier BV

发表日期

2009-05-28

DOI

10.1016/j.vacuum.2009.05.012

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