Article
Chemistry, Physical
Wenxiang Xie, Zhenyu Zhang, Shiqiang Yu, Li Li, Xiangxiang Cui, Qinming Gu, Zeyun Wang
Summary: In this study, four environmentally friendly additives were added to the polishing slurries to improve the material removal rate (MRR) of silicon wafers in chemical mechanical polishing (CMP). The results showed that ammonium citrate achieved the highest MRR, increasing it by 71.6% to 1979.88 angstrom/min when the concentration was 0.05 mol/L. The surface roughness (Sa) was decreased from 1.131 nm to 0.563 nm. The polishing slurry with colloidal silica as abrasives maintained good dispersibility. Electrochemical analysis, X-ray photoelectron spectroscopy, and coefficient of friction tests were conducted to explain the polishing mechanism. This work highlights the interfacial action between the polishing slurry and silicon wafers, providing a new idea for high efficiency CMP of silicon wafers in the manufacture of integrated circuits and photovoltaic industry.
SURFACES AND INTERFACES
(2023)
Review
Chemistry, Multidisciplinary
Wantang Wang, Xuesong Lu, Xinke Wu, Yiqiang Zhang, Rong Wang, Deren Yang, Xiaodong Pi
Summary: 4H silicon carbide (4H-SiC) is a promising material for high-power and high-frequency electronics, and high-quality 4H-SiC wafers with planarization are crucial for their performance. Chemical-mechanical polishing (CMP) is the key technology for planarization of 4H-SiC wafers. This review introduces the properties of 4H-SiC and the processing of its wafers. The development of CMP with chemical, mechanical, and chemical-mechanical synergistic approaches to enhance its performance is systematically reviewed. The prospect of these improvement approaches is provided by comparing CMP's material removal rate and surface roughness of 4H-SiC wafers.
ADVANCED MATERIALS INTERFACES
(2023)
Article
Engineering, Mechanical
Qixiang Zhang, Jisheng Pan, Xiaowei Zhang, Jiabin Lu, Qiusheng Yan
Summary: This study evaluated the effect of different polishing slurries on single crystal 6H-SiC friction and wear, showing that the SiC surface only had scratches when silica sol abrasive was present, and a loose and porous chemical reaction layer formed when oxidant was present.
Article
Engineering, Manufacturing
Liqing Qiao, Liwei Ou, Kang Shi
Summary: An efficient wireless photoelectrochemical mechanical polishing (WPECMP) method was proposed based on the mechanism of bipolar photoelectrochemistry, which applies a wireless electric field to separate photogenerated electron-hole pairs during polishing. The WPECMP method enables wafers to achieve a damage-free surface/subsurface, with a lower surface roughness and higher surface flatness compared to the CMP technology.
JOURNAL OF MANUFACTURING PROCESSES
(2023)
Article
Chemistry, Physical
Longxing Liao, Zhenyu Zhang, Fanning Meng, Dongdong Liu, Bin Wu, Yubiao Li, Wenxiang Xie
Summary: This study investigated the influence of CMP slurries with different pH values and oxidants on the quality of polished SCD surface, and found that the optimal slurry achieved the lowest surface roughness. The CMP mechanism was elucidated by XPS and IR spectroscopy, showing that hydroxyl radicals and hydrogen ions played a crucial role in achieving an ultra-smooth SCD surface.
APPLIED SURFACE SCIENCE
(2021)
Article
Polymer Science
Wei-Lan Chiu, Ching- Huang
Summary: Chemical mechanical planarization (CMP) is a wet procedure that combines chemical and mechanical forces to flatten materials for semiconductors. The use of CMP is crucial for achieving small nano-sized devices with few defects and high wafer yields. The choice of abrasive particles in the slurry, whether inorganic or polymer nanoparticles, affects the removal rates, uniformity, defects, and removal selectivity on the wafer surface. We found that polymer nanoparticles significantly improved uniformity and reduced defect counts, although their removal rates were lower than inorganic nanoparticles. The physical properties of polymer nanoparticles, such as size, shape, and molecular types, also influence the polishing performance.
Article
Engineering, Manufacturing
Zhenyu Zhang, Jie Liu, Wei Hu, Lezhen Zhang, Wenxiang Xie, Longxing Liao
Summary: The novel green CMP technique effectively reduces the surface roughness of sapphire, achieving lower material removal rates and processing times, providing new perspectives for the semiconductor and microelectronic industries.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Engineering, Manufacturing
Wenxiang Xie, Zhenyu Zhang, Li Wang, Xiangxiang Cui, Shiqiang Yu, Hongjiu Su, Shudong Wang
Summary: In this study, potassium ions were used to effectively improve the material removal rate (MRR) of silicon wafers during chemical mechanical polishing (CMP). Experimental results showed that the MRR increased by 53.42% to 1778.71 angstrom/min when the concentration of potassium ions was 125 mmol/L. The surface roughness Sa was slightly improved to 0.887 nm. X-ray photoelectron spectroscopy, friction coefficient meter, and electrochemical analysis were used to investigate the CMP mechanism, revealing that potassium ions could alter the electrical characteristics of the formed soft layer on the silicon wafer surface, leading to the dissolution of the soft layer and oxidation of the silicon surface.
JOURNAL OF MANUFACTURING PROCESSES
(2023)
Article
Engineering, Electrical & Electronic
Ritwik Nag, Sandeep K. Chaudhuri, Joshua W. Kleppinger, OmerFaruk Karadavut, Krishna C. Mandal
Summary: A modified vertical Bridgman method was used to grow CZTS single crystals for room-temperature radiation detection, achieving high resistivity, crystallinity, and desired elemental composition. The growth technique reduced duration and production costs of CZTS-based detectors.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2021)
Review
Physics, Applied
Lu Liu, Zhenyu Zhang, Bin Wu, Wei Hu, Fanning Meng, Yubiao Li
Summary: Green CMP slurries, composed of environmentally friendly compositions, have attracted interest due to their unique physical and chemical properties. These slurries contain special structures with versatile functional groups, including excellent chelating ability, ionization activity, biocompatibility, and biodegradability.
JOURNAL OF PHYSICS D-APPLIED PHYSICS
(2021)
Article
Engineering, Electrical & Electronic
Sandeep K. Chaudhuri, Joshua W. Kleppinger, OmerFaruk Karadavut, Ritwik Nag, Rojina Panta, Forest Agostinelli, Amit Sheth, Utpal N. Roy, Ralph B. James, Krishna C. Mandal
Summary: In this article, the growth of Cd0.9Zn0.1Te0.97Se0.03 (CZTS) wide bandgap semiconductor single crystals for room temperature gamma-ray detection is reported. The article also introduces a deep convolutional neural network (CNN) that efficiently identifies the energy of gamma photons detected by a CZTS detector. The CNN is trained using simulated data and shows low prediction error for different energy levels.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2022)
Article
Automation & Control Systems
Zhongyang Li, Zhaohui Deng, Jimin Ge, Tao Liu, Linlin Wan
Summary: This article investigates the effects of single-sided chemical mechanical polishing (SS-CMP) and double-sided chemical mechanical polishing (DS-CMP) on sapphire wafers. The results show that DS-CMP achieves better material removal rate and surface roughness compared to SS-CMP, and it can also achieve better surface quality under higher polishing pressure. Additionally, the parallelism of DS-CMP is superior to SS-CMP.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2022)
Article
Chemistry, Physical
Zifeng Zhao, Zhenyu Zhang, Chunjing Shi, Junyuan Feng, Xuye Zhuang, Li Li, Fanning Meng, Haodong Li, Zihang Xue, Dongdong Liu
Summary: Quartz glass has excellent physicochemical properties and is widely used in modern high technology. Traditional polishing slurry, which often contains strong acid, strong alkali, and corrosive additives, causes environmental pollution and damages the parts. To address these issues, a novel quartz glass polishing slurry was developed using cerium oxide, Lanthanum oxyfluoride, potassium pyrophosphate, sodium N-lauroyl sarcosinate, and sodium polyacrylate. The slurry showed improved suspension stability and resulted in a smoother sample surface with a lower surface roughness and higher material removal rate compared to the current industry standard.
Article
Materials Science, Ceramics
Xiaozhe Yang, Xu Yang, Haiyang Gu, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
Summary: This paper proposes a slurryless, highly efficient polishing method called ultrasonic vibration assisted electrochemical mechanical polishing (UAECMP) for achieving subnanometer surface roughness on 4H-SiC wafers. The performance of UAECMP was evaluated and compared to ordinary electrochemical mechanical polishing and mechanical polishing. The results showed that UAECMP achieved a significantly higher material removal rate and that ultrasonic vibration played a crucial role in increasing the anodic oxidation rate. However, increasing the ultrasonic vibration amplitude also led to an increase in surface roughness, suggesting the need for a combined UAECMP and ECMP process.
CERAMICS INTERNATIONAL
(2022)
Article
Engineering, Manufacturing
Longxing Liao, Zhenyu Zhang, Fanning Meng, Dongdong Liu, Jie Liu, Yubiao Li, Xiangxiang Cui
Summary: A novel rotary chemical mechanical polishing (R-CMP) method has been proposed to improve the efficiency and quality of polishing an integral impeller, reducing surface roughness and damage layer thickness successfully. The polishing time is twenty times faster than traditional manual polishing, opening a new pathway for high efficiency and high quality polishing of complex curved surfaces without external pressure.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Nanoscience & Nanotechnology
Shengcheng Shu, Dan Dai, Chih-Yeh Chung, Qilong Yuan, Bo Wang, Tien-Tsai Hung, Wen Dai, Qiuping Wei, Li Fu, Jinhong Yu, Nan Jiang, He Li, Cheng-Te Lin, Shi-Kun Chen, Tsung-Shune Chin
Summary: The study focused on depositing nanostructured carbon coatings on stainless steel as a method to enhance the corrosion resistance of metallic bipolar plates. The coated stainless steel showed significantly improved corrosion resistance compared to uncoated stainless steel and commercial graphite bipolar plates, with potential applications in various fields.
APPLIED NANOSCIENCE
(2021)
Article
Nanoscience & Nanotechnology
J. Yi, M. M. Yang, X. D. Luo, A. Rosenkranz, B. Wang, H. Song, N. Jiang
Summary: In this study, the tribological performance of novel self-lubricating chemical vapor-deposited MoS2 coatings binary-doped with antimony (Sb) and silver (Ag) was assessed, showing excellent solid lubrication performance and outstanding wear resistance. The wear rate was reduced by two orders of magnitude for the binary-doped Sb/Ag-MoS2 composite coatings compared to the un-doped MoS2 coating.
APPLIED NANOSCIENCE
(2021)
Article
Chemistry, Physical
Jiaqi Chao, Jiekai Feng, Faze Chen, Bo Wang, Yanling Tian, Dawei Zhang
Summary: This article reports a method for fabricating superamphiphobic surfaces with tunable oil adhesion, achieved by adjusting parameters during the processing to control the adhesion of oil droplets on the surface. This work provides a simple approach to fabricate superamphiphobic surfaces and control oil adhesion in the atmosphere.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2021)
Article
Chemistry, Multidisciplinary
Philipp G. Grutzmacher, Sebastian Suarez, Aura Tolosa, Carsten Gachot, Guichen Song, Bo Wang, Volker Presser, Frank Muecklich, Babak Anasori, Andreas Rosenkranz
Summary: MXenes exhibit superior lubrication performance, outperforming other 2D nanomaterials by increasing their wear life by 200% and showing an extremely low wear rate under high pressure.
Article
Electrochemistry
Sergio Gonzalez-Poggini, Andreas Rosenkranz, Bo Wang, Samuel Hevia, Jinhong Yu, Melanie Colet-Lagrille
Summary: The study found that incorporating Ti3C2Tx nano-sheets (MXenes) on SnO2/Ti electrodes can enhance their electro-oxidation catalytic activity for the degradation of methyl red. The MXenes-SnO2/Ti electrodes show better catalytic performance and lower charge transfer resistance compared to pure SnO2/Ti electrodes.
INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE
(2021)
Article
Materials Science, Multidisciplinary
Shengcheng Shu, Qilong Yuan, Wen Dai, Mingliang Wu, Dan Dai, Ke Yang, Bo Wang, Cheng-Te Lin, Thomas Wuebben, Jost Degenhardt, Christoph Regula, Ralph Wilken, Nan Jiang, Joerg Ihde
Summary: The in-situ process designed for fabricating graphene-like carbon (GLC) reinforcing copper-matrix composites through modified PECVD method and vacuum hot pressing has successfully achieved homogeneous dispersion of graphene in the copper matrix, leading to excellent thermal conductivity and wear resistance properties.
MATERIALS & DESIGN
(2021)
Article
Materials Science, Ceramics
Haoyu Shi, Gongyu Liu, Guilin Yang, Qingzhen Bi, Yongjie Zhao, Bo Wang, Xu Sun, Xiaoling Liu, Huan Qi, Wenhao Xu, ChungKet Thein, Hao Nan Li
Summary: This paper proposes an analytical model to calculate the size and shape of edge chipping in the scratch of soda-lime glass, considering the strain-rate hardening effect. A series of experimental trials were conducted to validate the accuracy of the model under different parameters. The key findings of this research are expected to provide meaningful and helpful references in the real fabrication of high-valued optical devices made of SLG.
CERAMICS INTERNATIONAL
(2021)
Article
Chemistry, Physical
Shengcheng Shu, Qiang Zhang, Joerg Ihde, Qilong Yuan, Wen Dai, Mingliang Wu, Dan Dai, Ke Yang, Bo Wang, Chen Xue, Hongbing Ma, Xu Zhang, Jiemin Han, Xuyuan Chen, Cheng-Te Lin, Wanbin Ren, Yifei Ma, Nan Jiang
Summary: Graphene has shown promise as an effective reinforcement for metal matrix composites due to its exceptional properties, but achieving uniform dispersion remains a challenge. A gel-assisted route was designed to produce graphene-reinforced copper matrix composites with significantly enhanced mechanical properties, low friction coefficient, and improved wear resistance, offering a new solution for mass production of graphene-based composites.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Materials Science, Composites
Yue Qin, Bo Wang, Xiao Hou, Linhong Li, Chunlong Guan, Zhongbin Pan, Maohua Li, Yuefeng Du, Yunxiang Lu, Xianzhe Wei, Shaoyang Xiong, Guichen Song, Chen Xue, Wen Dai, Cheng-Te Lin, Jian Yi, Nan Jiang, Jinhong Yu
Summary: Polymer composites with high thermal conductivity are in high demand for electronic packaging fields due to their light weight, easy process, and high chemical resistance. The development of a novel hybrid filler structure, similar to a Tanghulu-like structure, has shown to significantly enhance thermal conductivity and heat transportation performance in the polymer composites, representing a promising strategy for future applications in electronic packaging.
COMPOSITES COMMUNICATIONS
(2022)
Article
Materials Science, Multidisciplinary
Yunxiang Lu, Bo Wang, Qing Mu, Ke Yang, He Li, Andreas Rosenkranz, Nan Jiang, Ping Zhou
Summary: This study successfully fabricated smooth and damage-free diamond surfaces using a vitrified bonded diamond wheel. The results from grinding speed, atomic force microscopy, and transmission electron microscopy demonstrated the significant influence of grinding conditions on the surface quality and subsurface damage of diamond.
DIAMOND AND RELATED MATERIALS
(2022)
Article
Chemistry, Physical
Stephan Tremmel, Xiongxin Luo, Benedict Rothammer, Armin Seynstahl, Bo Wang, Andreas Rosenkranz, Max Marian, Laipan Zhu
Summary: This study investigates the performance of protective thin films on the wear-prone PTFE surface of TENGs, including doped and undoped DLC films, MoS2 coatings, and MXene films. MXenes showed superior performance in contact separation mode, while undoped a-C: H coatings performed well in sliding mode. Long-term tests showed minimal wear on the films, with output reduction primarily due to graphitization and material transfer.
Article
Materials Science, Multidisciplinary
Jose Y. Aguilar Hurtado, Philipp G. Gruetzmacher, Javier Marques Henriquez, Dario Zambrano, Bo Wang, Andreas Rosenkranz
Summary: Multilayer Ti3C2TX nanosheets have gained attention due to their ability to form beneficial tribolayers. This study compares the solid lubrication ability of spray-coated few- or multilayer Ti3C2Tx coatings and finds that multilayer Ti3C2Tx nanosheets exhibit superior tribological performance compared to few-layer MXenes, which show continuously rising frictional values.
ADVANCED ENGINEERING MATERIALS
(2022)
Review
Chemistry, Physical
Yue Xia, Yunxiang Lu, Guoyong Yang, Chengke Chen, Xiaojun Hu, Hui Song, Lifen Deng, Yuezhong Wang, Jian Yi, Bo Wang
Summary: Nano-crystalline diamond has been extensively researched and applied in various fields, including tribology, optics, quantum information and biomedicine. It outperforms other materials in terms of wear resistance due to its hardness. Nano-crystalline diamond coatings can have a friction coefficient as low as single-crystal diamonds, making them ideal for friction reduction and wear resistance.
Article
Chemistry, Physical
Linhong Li, Maohua Li, Zihui Zhang, Yue Qin, Xiaoxue Shui, Juncheng Xia, Shaoyang Xiong, Bo Wang, Zhenbang Zhang, Xianzhe Wei, Xiangdong Kong, Ping Gong, Tao Cai, Zhongbin Pan, Yong Li, Jinchen Fan, Cheng-Te Lin, Nan Jiang, Jinhong Yu
Summary: Simultaneously achieving high thermal transportation performance and superior mechanical properties in a thermal management composite film is a significant challenge. In this study, hybrid nano and micro-diamonds were introduced to cellulose nanofibers and boron nitride nanosheets to construct a long-range ordered sandwiched structure. The resulting composite film exhibits high thermal conductivity, robust mechanical properties, and excellent electrical insulation performance.
JOURNAL OF MATERIALS CHEMISTRY A
(2022)
Article
Chemistry, Multidisciplinary
Shaoyang Xiong, Yue Qin, Linhong Li, Guoyong Yang, Maohua Li, Xianzhe Wei, Guichen Song, Weidong Man, Bo Wang, Tao Cai, Jian Yi, Li Fu, Cheng-Te Lin, Nan Jiang, Kazuhito Nishimura, Jinhong Yu
Summary: Constructing a three-dimensional thermal transport skeleton is an effective method for enhancing the thermal conductivity of polymer composites. By depositing nano-crystalline diamond on alumina foam impregnated with epoxy, a composite with significantly improved thermal conductivity was successfully prepared, demonstrating excellent thermal transportation and stability properties.
