Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars
出版年份 2014 全文链接
标题
Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars
作者
关键词
-
出版物
Scientific Reports
Volume 4, Issue 1, Pages -
出版商
Springer Nature
发表日期
2014-03-25
DOI
10.1038/srep04458
参考文献
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