Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography

标题
Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 9, Pages G125
出版商
The Electrochemical Society
发表日期
2009-07-25
DOI
10.1149/1.3158593

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