Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching
出版年份 2015 全文链接
标题
Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching
作者
关键词
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出版物
RSC Advances
Volume 5, Issue 8, Pages 5638-5646
出版商
Royal Society of Chemistry (RSC)
发表日期
2014-12-12
DOI
10.1039/c4ra15907a
参考文献
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