Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process

A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding

(2011) T V Galchev et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A Microfluidic Hydrogel Capable of Cell Preservation without Perfusion Culture under Cell-Based Assay Conditions

(2010) Yan Xu et al.   ADVANCED MATERIALS

Nanobonding Technology Toward Electronic, Fluidic, and Photonic Systems Integration

(2010) M. M. R. Howlader et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Nanofluidic technology for biomolecule applications: a critical review

(2010) M. Napoli et al.   LAB ON A CHIP

Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding

(2010) S. Queste et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Hybrid plasma bonding for void-free strong bonded interface of silicon/glass at 200°C

(2010) M.M.R. Howlader et al.   TALANTA

Nanofluidics in Lab-on-a-Chip Devices

(2009) Michelle L. Kovarik et al.   ANALYTICAL CHEMISTRY

Nanofluidics in chemical analysis

(2009) Aigars Piruska et al.   CHEMICAL SOCIETY REVIEWS

Role of Heating on Plasma-Activated Silicon Wafers Bonding

(2009) M. M. R. Howlader et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Development of a pressure-driven nanofluidic control system and its application to an enzymatic reaction

(2008) Takehiko Tsukahara et al.   ANALYTICAL AND BIOANALYTICAL CHEMISTRY

Fully Integrated Glass Microfluidic Device for Performing High-Efficiency Capillary Electrophoresis and Electrospray Ionization Mass Spectrometry

(2008) J. S. Mellors et al.   ANALYTICAL CHEMISTRY

Void-Free Room-Temperature Silicon Wafer Direct Bonding Using Sequential Plasma Activation

(2008) Chenxi Wang et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Room temperature UV adhesive bonding of CE devices

(2008) Susan Carroll et al.   LAB ON A CHIP