Densification and Hydration of HMDSO Plasma Polymers

标题
Densification and Hydration of HMDSO Plasma Polymers
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 12, Issue 1, Pages 32-41
出版商
Wiley
发表日期
2014-10-16
DOI
10.1002/ppap.201400118

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