Plasma-Substrate Interaction during Plasma Deposition on Polymers

标题
Plasma-Substrate Interaction during Plasma Deposition on Polymers
作者
关键词
-
出版物
CONTRIBUTIONS TO PLASMA PHYSICS
Volume 54, Issue 2, Pages 162-169
出版商
Wiley
发表日期
2014-02-11
DOI
10.1002/ctpp.201310064

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