Aligned silicon nanowires with fine-tunable tilting angles by metal-assisted chemical etching on off-cut wafers
出版年份 2013 全文链接
标题
Aligned silicon nanowires with fine-tunable tilting angles by metal-assisted chemical etching on off-cut wafers
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume 7, Issue 9, Pages 655-658
出版商
Wiley
发表日期
2013-06-10
DOI
10.1002/pssr.201307190
参考文献
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