Using colloid lithography to fabricate silicon nanopillar arrays on silicon substrates

标题
Using colloid lithography to fabricate silicon nanopillar arrays on silicon substrates
作者
关键词
-
出版物
JOURNAL OF COLLOID AND INTERFACE SCIENCE
Volume 367, Issue 1, Pages 40-48
出版商
Elsevier BV
发表日期
2011-10-27
DOI
10.1016/j.jcis.2011.10.044

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