Effect of Negative Substrate Bias Voltage on the Nucleation and Growth of Cu Films during the Initial Stage of Ion Beam Deposition

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 14, Issue 3, Pages 381-384

出版商

Springer Nature

发表日期

2008-06-30

DOI

10.3365/met.mat.2008.06.381

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