Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

出版年份 2013 全文链接

标题

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

作者

关键词

-

出版物

MATERIALS LETTERS

Volume 101, Issue -, Pages 72-75

出版商

Elsevier BV

发表日期

2013-03-24

DOI

10.1016/j.matlet.2013.03.079

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