Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 27, Issue 6, Pages 2668

出版商

American Vacuum Society

发表日期

2009-12-15

DOI

10.1116/1.3242693

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