Projection maskless patterning for nanotechnology applications

标题
Projection maskless patterning for nanotechnology applications
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2059-2063
出版商
American Vacuum Society
发表日期
2008-12-16
DOI
10.1116/1.2993260

向作者/读者发起求助以获取更多资源

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started