Influence of organozinc ligand design on growth and material properties of ZnS and ZnO deposited by atomic layer deposition

标题
Influence of organozinc ligand design on growth and material properties of ZnS and ZnO deposited by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 3, Pages 031507
出版商
American Vacuum Society
发表日期
2011-04-06
DOI
10.1116/1.3572232

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