Characteristics of Zinc-Oxide-Sulfide-Mixed Films Deposited by Using Atomic Layer Deposition

标题
Characteristics of Zinc-Oxide-Sulfide-Mixed Films Deposited by Using Atomic Layer Deposition
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 6, Pages 3287-3295
出版商
Korean Physical Society
发表日期
2009-06-26
DOI
10.3938/jkps.53.3287

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