Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 108

标题
Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 108
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 107, Issue 26, Pages 263501
出版商
AIP Publishing
发表日期
2015-12-29
DOI
10.1063/1.4938747

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