A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics

标题
A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 3, Pages 035011
出版商
IOP Publishing
发表日期
2011-02-09
DOI
10.1088/0960-1317/21/3/035011

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