A finite element technique for accurate determination of interfacial adhesion force in MEMS using electrostatic actuation

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 21, Issue 11, Pages 115025

出版商

IOP Publishing

发表日期

2011-10-21

DOI

10.1088/0960-1317/21/11/115025

参考文献

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