Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology

标题
Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology
作者
关键词
-
出版物
JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY
Volume 24, Issue 15-16, Pages 2545-2556
出版商
Informa UK Limited
发表日期
2010-10-22
DOI
10.1163/016942410x508262

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