Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting

标题
Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 22, Issue 1, Pages 26-33
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-09-02
DOI
10.1109/jmems.2012.2213069

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