期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 17, 期 2, 页码 462-472出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2008.918398
关键词
electromechanical effects; electrothermal effects; microactuators; piezoelectric materials; scaling and materials selection
类别
资金
- University of Southampton
- University of Southampton, the Overseas Research Students Award Scheme
- Royal Society-Wolfson Research Merit Award
Piezoelectric actuation is one of the commonly employed actuation schemes in microsystems. This paper focuses on identifying and ranking promising active material/substrate combinations for bimaterial piezoelectric (BPE) microactuators based on their performance. The mechanics of BPE structures following simple beam theory assumptions available in the literature are applied to evolve critical performance metrics which govern the materials selection process. Contours of equal performance are plotted in the domain of the governing piezoelectric material properties (d coefficients, elastic modulus, coupling factors and dielectric constants) for commonly employed substrates to identify optimal material combinations for various functional requirements. The influence of materials selection on the actuation efficiency, quality factor and the electromechanical impedance is also discussed. Selection of a suitable actuation mechanism for a boundary layer flow control application is illustrated by comparing the performance limits of BPE and bimaterial electrothermal actuators considering the constraints on the functional requirements imposed by the associated microfabrication routes.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据