Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process

标题
Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 11, Pages H303
出版商
The Electrochemical Society
发表日期
2008-09-13
DOI
10.1149/1.2973336

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