Doping controlled roughness and defined mesoporosity in chemically etched silicon nanowires with tunable conductivity

标题
Doping controlled roughness and defined mesoporosity in chemically etched silicon nanowires with tunable conductivity
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 3, Pages 034309
出版商
AIP Publishing
发表日期
2013-07-19
DOI
10.1063/1.4813867

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