Thin Polymer Films with High Step Coverage in Microtrenches by Initiated CVD

标题
Thin Polymer Films with High Step Coverage in Microtrenches by Initiated CVD
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 14, Issue 9-10, Pages 313-318
出版商
Wiley
发表日期
2008-10-06
DOI
10.1002/cvde.200806713

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