Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films

标题
Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 12, Pages 124907
出版商
AIP Publishing
发表日期
2008-12-20
DOI
10.1063/1.3043882

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