Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films

标题
Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 3, Pages 527-533
出版商
Elsevier BV
发表日期
2007-10-02
DOI
10.1016/j.mee.2007.09.006

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