Fabrication of Transparent TiO2−x Channel-Based Thin Film Transistors using an Oxygen-Deficient TiO2−x Target

标题
Fabrication of Transparent TiO2−x Channel-Based Thin Film Transistors using an Oxygen-Deficient TiO2−x Target
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 14, Issue 8, Pages H314
出版商
The Electrochemical Society
发表日期
2011-05-12
DOI
10.1149/1.3589983

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