Multifunctional Integrated Sensors for Multiparameter Monitoring Applications

标题
Multifunctional Integrated Sensors for Multiparameter Monitoring Applications
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 4, Pages 810-821
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-09-16
DOI
10.1109/jmems.2014.2349894

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