Area Selective Growth of Titanium Diselenide Thin Films into Micropatterned Substrates by Low-Pressure Chemical Vapor Deposition

标题
Area Selective Growth of Titanium Diselenide Thin Films into Micropatterned Substrates by Low-Pressure Chemical Vapor Deposition
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 25, Issue 23, Pages 4719-4724
出版商
American Chemical Society (ACS)
发表日期
2013-11-06
DOI
10.1021/cm402422e

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