Characteristics of N-doped TiO2 thin films grown on unheated glass substrate by inductively coupled plasma assisted dc reactive magnetron sputtering

标题
Characteristics of N-doped TiO2 thin films grown on unheated glass substrate by inductively coupled plasma assisted dc reactive magnetron sputtering
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 22, Pages 9149-9153
出版商
Elsevier BV
发表日期
2009-07-05
DOI
10.1016/j.apsusc.2009.06.126

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