Reduction of metal contact resistance of graphene devices via CO2 cluster cleaning

标题
Reduction of metal contact resistance of graphene devices via CO2 cluster cleaning
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 22, Pages 223110
出版商
AIP Publishing
发表日期
2014-06-06
DOI
10.1063/1.4881635

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